Defect Quantification of Metal Organic Chemical Vapor Deposition (MOCVD)
Monolayer Molybdenum Disulphide (MoS 2 ) using Kelvin Probe Force
Microscopy
Abstract
Defects are unavoidable during the synthesis of materials due to
thermodynamic equilibrium. In the synthesis of two-dimensional
transition metal dichalcogenide (2D TMDC), point defects emerge as a
dominant defect due to the absence of chalcogen atoms in the lattice
structure. In one or a few layers of TMDC materials, the presence of
defect states on the film surface changes their carrier concentration.
The changing of carrier concentration in monolayer TMDC film shifts the
position of the fermi level towards either conduction band edge or
valence band edge depending on the type of majority carriers. The
shifting of the fermi level changes the work function of the TMDC
monolayer film. The conventional hall measurement is not feasible to
measure the surface carrier concentration of 2D materials films.
Instead, kelvin probe force microscopy (KPFM) is used to measure surface
carrier density. The carrier density is calculated by measuring the work
function of the monolayer film using KPFM. Each point defect in 2D TMDC
materials increases the certain amount of carrier concentration that
facilitates the defect quantification. In this work, we tried to
quantify point defect in metal-organic chemical vapor deposition (MOCVD)
monolayer MoS 2 using kelvin probe force microscopy
(KPFM) by measuring the position of the fermi level that is shifted due
to the unbounded electrons of MoS 2.