Yen-Lin Chen edited subsection_Backscattered_Electrons_Backscattered_electrons__.tex  over 8 years ago

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\subsection{Backscattered Electrons}  Backscattered electrons 9BSE) are primary electrons that have been elastically scattered by the nuclei of the atoms in the sample. The energy of BSE ranges from $50eV$ to the energy of primary electron beam $I_0$. The backscattering in ESEM is the analogy of Rutherford backscattering spectroscopy (RBS) and the energy of backscattered electrons $E_{BSE}$ is a function of the deflected angle $\alpha$ and the atomic mass M of the target sample.   \begin{equation}  \frac{E_{BSE}}{E_0} = \bigg[ \frac{\sqrt{M^2+m^2sin^2\alpha}+mcos\alpha}{M+m} \frac{\sqrt{M^2-m^2sin^2\alpha}+mcos\alpha}{M+m}  \bigg]^2 \end{equation}