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Yen-Lin Chen edited subsection_Secondary_Electrons_Secondary_electrons__.tex
over 8 years ago
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diff --git a/subsection_Secondary_Electrons_Secondary_electrons__.tex b/subsection_Secondary_Electrons_Secondary_electrons__.tex
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--- a/subsection_Secondary_Electrons_Secondary_electrons__.tex
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The fraction of detection of SE by an $V$ biased ESD with detection area with radius $r$ placed $d$ from the sample is\cite{Huxley_1949}
\begin{equation}
R=\frac{I_{detected}}{I_0 \delta(\theta)} =
1-\frac{1}{G}exp\left( 1-\frac{1}{G} \space exp\left( \frac{eV}{2k_BT\epsilon}(1-G) \right)
\end{equation}
where $G$ is the geometric factor given determined by the experimental setup.
\begin{equation}