Amy Wendt edited untitled.tex  over 8 years ago

Commit id: f0f21c66b36abdcaac64f75e5cf58cf7437396ee

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The attraction of plasmas for these applications derives from the role of the free electrons present in all plasmas. A unique quality of plasmas critical to many applications is the capability of non-equilibrium chemistry; ``high-temperature'' gas phase reactions occur while substrates remain cool. These gas phase reactions, producing highly reactive neutral and ionic species that react with exposed substrate surfaces, are enabled by electron population selectively maintained at temperatures greater than 10,000$^\circ$F through heating by electromagnetic fields. Collisions between molecules in the gas phase and highly energetic electrons lead to chemical reactions that would require a high temperature reactor in the absence of the plasma.  The plan described herein to develop improved advanced  diagnostic tools for low-temperature plasmas will make a contribution toward the ultimate goal of ``predictive design'' of plasma processes. In particular, we seek to go beyond standard OES (optical emission spectroscopy) to  make use of the untapped potential of the glow emitted by the plasma, developing in order to develop  a non-invasive and easily-implemented  diagnosticbased  to probe the characteristics quantify plasma properties central to many applications, including electron temperature, electron density and dissociation fraction. Measured quantities will facilitate benchmarking  of process simulations and will guide process development and optimization. Furthermore, fast data acquisition and analysis enabled by this approach raises  the plasma. possibility of use in a feedback loop for real-time process control.  MENTION community demand - plasma 2020, low temperature plasma report, etc. Low cost, easy to implement. SHARE CODE *not*