Testing and analysis surface of the silicon oxide used in optical profile has been presented to calculation the uncertainty of optical profiler.The data have been showed that the standard deviation with process in manual are 40 percent error. The data are unexpected. However the cost of running in the test are really high which retest are not available therefore setup and testing in condition are really important when do in this test. Future work need to study in environmental condition the testing with help a lot of in research study. .