loading page

On adsorption fluctuations during deposition of monolayer thin films
  • Olga Jakšić, ​CMT-IChTM,Orcid,
  • vera_marinova
Olga Jakšić, ​CMT-IChTM,
Orcid
University of Belgrade
Author Profile
vera_marinova
Author Profile

Abstract

Adsorption and desorption processes that take place in repeated pulses of atomic layer deposition of thin films, are basically stochastic in nature. So far, various tools have been developed for analytical and numerical investigations of fluctuation kinetics of adsorption in time domain and fluctuation dynamics of adsorption in frequency domain. We present here review of these tools for the example of ozone adsorption on Graphene.