In this study, we compare the scaling of waiting time distributions in Northern Chile Subduction context. For this, we analized 7-yr high spatial resolution and low complete- ness magnitude IPOC seismic catalog and 45-yr USGS catalog. A unified moment-epicentral area linear dimension-time scaling relation is empirically evaluated by calculating wait- ing times for different ranges of magnitude and epicentral area linear dimension and es- timating associated scaling coefficients, β analog to b-value and γ, the correlation frac- tal dimension. We find a scaling function that can be characterized with 3 distinct re- gions, regions whose behaviour depend on whether seismicity is in the coastal area or from intermediate depth. Moreover, high resolution localizations from IPOC catalog al- lows us to further observe differences in coastal seismicity, with lower plane seismicity behaviour alike intermediate depth. Thus, waiting time distribution primarily depends on whether seismicity is associated with subduction interface interaction or not, having respectively high/low correlated behaviour in the short scale region, non-exponential/exponential decay in the transition middle region and in all cases long-term clustering with a slower than exponential decay in the long scale.