2.2 Evaluation of geometrical characteristics

Figure 3 shows the top-view SEM images of the (a) silicon micropost master, (b) PDMS replicated mold with microholes, and (c) UV-imprinted micropost structures on the glass substrate. The measured diameters of micropost structure on silicon master, PDMS mold and UV-imprinted part were same as 300 μm. The cross patterns located between the micropost structures were the align marks used for spotting process of antibodies. Figure 3(d) shows the comparison of the cross-sectional surface profiles of the micropost structure on the silicon master, PDMS mold (inverted), and imprinted pattern obtained by a 3D confocal microscope (OLS4100-SWF, Olympus Co., Ltd., Japan). The measured height of the micropost structure in each sample was 49.7 μm for the silicon master, 49.9 μm for the PDMS mold (inverted), and 50.7 μm for the micropost substrate. In each process, the samples were clearly shown to be replicated with similar dimensions (the differences of geometrical dimensions were negligible considering the measurement errors).