Analysis

Monte Carlo simulations were performed using KLayout and Lumerical Interconnect to better predict measured performance over process variation. Simulations were performed using typical process variations for Applied Nanotool's process and 50 die sites per wafer over a single wafer. The results are shown below for the MZI with \(\Delta L=100\mu m\): MZI transmission spectrum in Fig. 12 and MZI FSR histogram in Fig. 13