Attenuation factors as a function of a scalable parameter u at different conditions; at fixed period with fixed wavelength a, fixed period with fixed strip width b, and fixed strip width with fixed wavelength c. (a) The black solid line (black dashed line) represents the attenuation factor from the graing with strip width of 10 \(\mu\)m for He (D2) while red solid line (red dashed line) and blue solid line (blue dashed line) desribe those from the gratings with strip width of 100 \(\mu\)m and strip width of 200 \(\mu\)m for He (D2), respectively. (b) The black solid line (red solid line) shows the attenuation factor for the wavelength of 136 pm (wavelength of 320 pm) (c) The attenuation factor for the period of 6 \(\mu\)m, period of 10 \(\mu\)m and period of 50 \(\mu\)m are described by the black solid line, red solid line and blue solid line, respectively