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Design of experiments: optimisation of an ITO sputtering recipe
  • Florent-Valéry Coen,
  • Damien Maillard,
  • Matthias Neuenschwander
Florent-Valéry Coen
EPFL

Corresponding Author:florent-valery.coen@epfl.ch

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Damien Maillard
EPFL
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Matthias Neuenschwander
EPFL
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