I. Introduction
Nanoelectromechanical systems (NEMS) are the new technology to design the
small mechanical device with nanosized. The part cantilever inside can move up
and down dependence on application. The technique to fabricate cantilever structures
using semiconductor processing technique which has been using widely in MEMS technology. Because of demand a lot application in medical, this
technique has a lot attention from engineer to focus and study, using macro fundamental in mechanical to Nano
fundamental design of nano cantilever create the biosensor device which apply
in biological physics and bioengineering. Those techniques can mass production mechanical
biosensors device. The figure (1) shows
that system device building with structure analyst and biosensor and
transducer. Analyst or bio element is thins layer films on the surface
interaction with of surrounding chemical or biological reaction based on the
mechanism of diffusion, flow and
adsorption and desorption on the surface of cantilever. Transducer is the
cantilevers governs by mechanical and convert the micromotion to electrical
signal
