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Monitoring Agglomeration in CMP Slurries with Holographic Video Microscopy            
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  • Fook Chiong Cheong,
  • Annemarie Winters,
  • Priya Kasimbeg,
  • Jaroslaw M. Blusewicz,
  • David Ruffner,
  • Laura A. Philips
Fook Chiong Cheong
Spheryx, Inc.
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Annemarie Winters
Spheryx, Inc.
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Priya Kasimbeg
Spheryx, Inc.
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Jaroslaw M. Blusewicz
Spheryx, Inc.
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David Ruffner
Spheryx, Inc.
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Laura A. Philips
Spheryx, Inc.
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Abstract

Holograms of nanoparticle agglomerates can be analyzed with the theory of light scattering to obtain information about the agglomerates’ size, refractive indexes and morphology within their host nanoparticle slurry. This technique can be used to measure the concentration of agglomerates in precision nanoparticle slurries, to distinguish dense compact agglomerates from transient branch agglomerates. and to differentiate agglomerates from other contaminants, such as emulsion droplets and polishing debris. Furthermore, this technique, unique ability to study slurries undiluted, can be used to monitor agglomeration behavior of slurries under different stress conditions. This is the ideal tool to study agglomeration in commercial slurries during formulation, preparation, transportation, and applications in CMP slurries.