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Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platform.
  • +6
  • Paul Gow,
  • Glenn Churchill,
  • Valerio Vitali,
  • Thalia Dominguez-Bucio,
  • Frederic Gardes,
  • Matthew D'Souza,
  • Periklis Petropoulos,
  • Corin Gawith,
  • James Gates
Paul Gow
University of Southampton Faculty of Engineering and Physical Sciences

Corresponding Author:[email protected]

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Glenn Churchill
University of Southampton Faculty of Engineering and Physical Sciences
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Valerio Vitali
University of Southampton Faculty of Engineering and Physical Sciences
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Thalia Dominguez-Bucio
University of Southampton Faculty of Engineering and Physical Sciences
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Frederic Gardes
University of Southampton Faculty of Engineering and Physical Sciences
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Matthew D'Souza
University of Southampton Faculty of Engineering and Physical Sciences
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Periklis Petropoulos
University of Southampton Optoelectronics Research Centre
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Corin Gawith
University of Southampton Faculty of Engineering and Physical Sciences
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James Gates
University of Southampton Faculty of Engineering and Physical Sciences
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Abstract

We report a ductile dicing process for manufacturing optical-quality facets in a multi-layered silicon nitride platform without the need for polishing. A surface roughness (Sa) of 1.5 nm was achieved. This technique was extended to fabricate ridge waveguides, and the results and characterization are reported.