Enhancement of Two-Step Low-Temperature Annealing Treatment on
Electrical Performance of In-Sn-O Thin-Film Transistors
Abstract
Herein, we report a two-step low-temperature annealing method to enhance
performance of InSnO (ITO) thin-film transistors (TFTs). In case of
one-step annealing treatment, threshold voltage (Vth) of
the ITO TFTs present a negative correlation with annealing temperature.
Therefore, we design a two-step low-temperature annealing process to
purposely modulate electrical properties of the ITO TFTs. The results
show that the ITO TFTs annealed at 200 °C for 1 h at first and then
annealed at 150 °C for 0.5 h exhibit the best performance, and the major
properties includes a saturation mobility (µsat) of 21.0
cm2V-1s-1, a
Vth of -1.1 V, a subthreshold swing (SS) of 560.5 mV/cm,
and an on-to-off state current ratio
(Ion/Ioff) of 5.79 ×
108. Moreover, the ITO TFTs exhibit excellent bias
stress stability. This work demonstrates a low-temperature approach for
the enhancement of the oxide TFTs.