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Enhancement of Two-Step Low-Temperature Annealing Treatment on Electrical Performance of In-Sn-O Thin-Film Transistors
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  • Guangchen Zhang,
  • Junchen Dong,
  • Qi Li,
  • Dedong Han,
  • Xing Zhang,
  • Zhinong Yu
Guangchen Zhang
Beijing Institute of Technology

Corresponding Author:[email protected]

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Junchen Dong
Beijing Information Science and Technology University
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Qi Li
Peking University
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Dedong Han
Peking University
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Xing Zhang
Peking University
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Zhinong Yu
Beijing Institute of Technology
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Abstract

Herein, we report a two-step low-temperature annealing method to enhance performance of InSnO (ITO) thin-film transistors (TFTs). In case of one-step annealing treatment, threshold voltage (Vth) of the ITO TFTs present a negative correlation with annealing temperature. Therefore, we design a two-step low-temperature annealing process to purposely modulate electrical properties of the ITO TFTs. The results show that the ITO TFTs annealed at 200 °C for 1 h at first and then annealed at 150 °C for 0.5 h exhibit the best performance, and the major properties includes a saturation mobility (µsat) of 21.0 cm2V-1s-1, a Vth of -1.1 V, a subthreshold swing (SS) of 560.5 mV/cm, and an on-to-off state current ratio (Ion/Ioff) of 5.79 × 108. Moreover, the ITO TFTs exhibit excellent bias stress stability. This work demonstrates a low-temperature approach for the enhancement of the oxide TFTs.