Abstract
This paper presents the design and optimization of CPW (coplanar
waveguide) based tunable band pass filter by using RF MEMS capacitive
switches and distributed MEMS transmission line (DMTL). To achieve
tunability we have used Twelve MEMS capacitive type switches (six
fixed-fixed types and six cantilever type). The center frequency and
bandwidth tunability can be achieved by actuating shunt (fixed-fixed)
and series (cantilever type) switches respectively. Tunable filter
performance is mainly depending on the switches individual performance.
Actuation voltage, return loss, insertion loss are the basic performance
parameters of any RF MEMS switch. Electromechanical and RF performance
analysis of the switches are initially carried out to analyze the
performance without integrating with the DMTL structure. The designed
shunt and series switches require 15 and 22V respectively to reach the
beam 2/3 of the initial gap. Electro-mechanical analysis of the switches
is carried out for different conductor materials, dielectric materials,
different beam widths, different dielectric thickness values, and
different air gap vales. After integration of the switches with DMTL
structure to get the optimized filter a detailed electromagnetic
analysis of various parameters and materials are done. Simulation
results shows that return loss and insertion loss is improved by using
this structure. The center frequency of the filter has the variation
from 0.2-1 GHz with band pass return loss of -22.5dB. The band width
tuning of nearly 0.7 GHz with band pass insertion loss of -3dB is
achieved.